PZT actuator
Study of Valveless Piezoelectric Micropump Based on Parallel Double Chambers
Microfluidic systems have become the research foucs in MEMS field because extensive applications in many fields such as shipping industry, microbiological chips etc. Driving the liquid flows, micropump is one of the most important components of microfluidic system. Improvement about micropumps, such as miniaturization, integration, increasing the flow rate and optimizing the pumping performance, have [...]
Study on the Pneumatic Servo Valve with Piezoelectric Actuator
The pneumatic system has relatively simple,non-polluting,low cost,and a series of significant other advantages, make it widely used in mechanical manufacturing industry and other professions. In recent years, with the development of piezoelectric materials,the characteristic of electromechanical conversion about piezoelectric material was introduced as electromechanical converter into the pneumatic valve which is accelerated the development of [...]
Research on the Novel Controlling Method of Six-DOF Micro Positioning Platform
A novel method of Six-DOF micro positioning with PZT actuators have been studied, multi PZT actuators have been distributed spatially and applied voltage, six-DOF micro positioning finally has been realized.The major research works completed in this dissertation include:â‘ Based on the research of micropositioning at home and abroad, a novel technique of six DOF(degree of freedom) [...]